AMAT P5000 MARK-II CVD Reactor. CH-A: dual frequency lamp heated TEOS, oxide deposition chamber, doped and undoped, plasma enhanced with RF generator 350-450C. The P5000 is the most flexible, successful, single-wafer, multi-chamber CVD and etch system for manufacturing complex devices in high-volume production. P5000 Refurbishing & Parts, Precision 5000, Applied Materials, AMAT Equipment Versatek Solutions offers affordable parts and refurbishing service for Applied Materials' P5000 semiconductor systems. Home / Services / Applied Materials (AMAT) / P5000 Click to View in Full Detail Repair Information. Your P5000 will be thoroughly rebuilt, properly calibrated, and then tested for reliability and performance. This applies to both Etch and CVD varieties of the P5000. P5000 is a load-locked, magnetically enhanced reactive ion etching system (MERIE) with two functional process chambers (Chambers B & C).
Versatek Solutions offers affordable parts and refurbishing service for Applied Materials' Precision 5000 semiconductor systems.
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Amat P5000